フェライト材のメカノケミカルポリシング(第3報) : 多結晶材及び多結晶積層体への適用

概要

論文の詳細を見る
This paper presents some experimental results on the mechano-chemical polishing of bulk polycrystal ferrite as well as polycrystal ferrite laminated with other materials. A polishing plate made of tin is used with a polishing fluid chemically active to ferrite such as hydrochloric acid. Using the mechano-chemical process, the stock removal rate can be increased and the damaged layer of the polycrystal ferrite decreased, in contrast with those in the mechanical polishing process. For laminated ferrite, the micro-steps are substantially formed on the polished surface made of different materials. This feature is utilized for finishing the air bearing surfaces of multi-channel magnetic heads, when an electrochemical action is added to mechanical polishing, in order to compose the local cell between a ferrite and either a polishing plate or a laminated material.
公益社団法人精密工学会の論文
1990-12-05