微小管における液体の流れ : Navier-Stokes方程式の適用性に関する考察

概要

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Designing the micro-fluid machines as micro-pumps and micro-valves requires the clarification of fluid dynamics on the order of O.1-100μm. This paper describes the flow of liquids in micro-capillary tubes and a method of measuring it. The method can precisely measure flow rates as small as 10 pl/s to 10 nl/s. The estimated measurement error of the method is less than 6 percent for flow rate, and less than 4 kPa for pressure loss. In 4.5 to 50.5μm diameter micro-capillary tubes, the flow rate and the pressure loss were measured for silicon oil of 2.6×10^<-6> to 4.3×10^<-4>m^2/s kinematic viscosity. The measurement results showed that the flow rate is proportional to the pressure loss for a diameter of 11.2μm and kinematic viscosity of 4.3×l0^<-4>m^2/s. The measured values are in agreement with the theoretical values calculated by the Navier-Stokes equations.
公益社団法人精密工学会の論文
1993-03-05