マトリクス差点位置決め用偏光形光センサ

概要

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To realize precision positioning systems, a new polarization-detecting optical sensor has been developed. The sensor can detect 3-dimensional translation error (x, y, z) and 2-dimensional rotation error (φ, ψ) between the sensor and the printed board with guide patterns. The sensor is constructed by using two polarized lights and three position sensitive devices (PSD). The reflection lights from guide patterns are detected by two 2- dimensional PSDs. The translation error (x, y) can be detected by the output difference between the two 2-dimensional PSDs. Simultaneously, the rotation error (φ, ψ) can be detected by light spot position on a 2-dimensional PSD. Furthermore, the scattered lights from guide patterns are focused onto a 1-dimensional PSD. Therefore, the translation error (z) can be detected by the light spot position on the 1-dimensional PSD by triangulation. The performance of the optical sensor was investigated. The obtained detection dynamic ranges of translation error (x, y, z) and rotation error (φ, ψ) are ± 100μm (x, y), ± 1mm (z), ± 2.5° (φ, ψ) respectively. The detection accuracies are better than 1 % of each detection dynamic range. This sensor has a sufficient performance for precision positioning systems.
公益社団法人精密工学会の論文
1991-07-05