超微粒子の静電高速衝撃による薄膜形成法(第1報) : 膜成長中の超微粒子の電気力学的挙動

概要

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In order to develop the film formation method, highly charging, pulverizing and accelerating behavior of agglomerated ultra-fine carbon particles was studied by evaluating the charging values of particles extracted from a film-growth region which consists of plane parallel-electrodes held at high DC voltage in a vacuum of 1×10^<-4> Torr. As for the particle behavior, the following results are obtained; (1) in the applied electric field lower than 1 MV/m, particle charging can be made only by conduction mechanism at facing electrode surfaces, which leads to a reciprocating motion of particle between the electrodes. (2) As the applied field is increased, negatively charged particles which start from cathode are U-turned to the cathode due to yielding of electron emission and the consequent charge-polarity inversion and may be subjected to sequential hopping motion nearby cathode. (3) Initially agglomerated particles can be separated into nearly-individual ones through the above motion. This signifies that such refined agglomerates may attain a subsonic velocity of material and should be deposited in film-like form on cathode corresponding to substrate.
公益社団法人精密工学会の論文
1991-02-05