粉末粒子の静電加速による特殊加工法の研究(第6報) : 帯電粉末粒子ビームの静電レンズによる集束

概要

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In order to realize a new method of powder particle beam machining, a fundamental approach to obtain a dense beam of powder particles was made with an Einzel lens designed from electron optical theories. The mechanism of forming well-focused beam is theoretically analyzed by a graphical method based on the electron optics, so that each of the particle trajectory and density distribution is represented as a function of the optical values and dimension of the lens. The validity of the theoretical analysis was proved by comparing the calculated density distribution with the measured beam spot on target material. Furthermore it became clear that the off-axis trajectories affected by spherical aberration remarkably contribute to the beam-spot formation and that the average beam density in the focused spot can be increased by about thirty times that of non-focused beam.
公益社団法人精密工学会の論文
1991-12-05