大出力C0_2レーザ光によるセラミックコーティング法の開発

概要

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A new ceramic coating technique is developed, in which focused cw C0_2 laser beam over 1 kW can be irradiated on the peripheral surface of a rotating ceramic ring in vacuum. Main results obtained from fundamental experiments are as follows : (1) Firm and homogeneous ceramic films can be formed in a vacuum about 1.3×l0^<-2> Pa. (2) The coated films have an amorphous structure and the compositions are often different from those of the mother materials. (3) Hardnesses of the films are not lower than those of the mother materials. Especially very hard BN film of Knoop hardness over 39.2 GPa can be formed by evaporating the soft sintered hBN with high deposition rate over 0.2μm/min. (4) Ceramic coated Mo specimens show high wear-resistance in sliding experiments compared with the metal Mo itself. (5) Ceramic films coated on Mo substrates are effectively applicable to an absorbent plate against very high power C0_2 laser.
社団法人精密工学会の論文
1987-01-05