うねりの小さい表面凹凸の三次元測定における試料姿勢制御(第2報) : シミュレーションと実験

概要

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In this paper, the method I is compared with the method II. The method I is developed in the 1st report to control surface orientation by using two measuring lines perpendicular to each other and the method II by two parallel measuring lines. The results are as follows. (1)The measuring length for control data in the method I increases for anisotropic rough surface under the condition that the angle between measuring direction and lay orientation of asperities is less than 15°. (2)The measuring length for control data in the method II decreases as the coefficient <I>k</I><SUB>2</SUB> depending on a stylus speed decreases. (3)Both of the measuring length and the objective function showing measuring time in the method II are shorter than those in the method I for isotropic and anisotropic rough surfaces. Finally, the method II is better technique than the method I.
公益社団法人精密工学会の論文
1994-05-05