反射光の干渉による凹面形状測定

概要

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This paper describes a simple method whereby a concave surface is irradiated with coherent light and the resulting interference fringes yield information on the concave surface. This method can be applied to a surface which satisfies the following conditions; (1)the concave face has a mirror surface; (2)the profile of the face is expressed by a mathematical function with a point of inflection. In this interferometey, multi-light waves reflected from the concave surface interfere and make fringes wherever the reflected light propagates. Interference fringe pattern is clear even in the range of high fringe orders. Photographs of the fringe patterns for a uniformly loaded thin silicon plate clamped at the edge are shown experimentally. The experimental and the theoretical values of the maximum optical path difference show good agreement. This simple method can be applied to obtain accurate information on concave surfaces.
公益社団法人精密工学会の論文
1984-02-05