環境汚染ガスと浮遊粒子状物質検出用半導体薄膜センサ

概要

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A micro sensor for polluting gases and organic floating particles has been developed. The sensor is composed of two parts: a sensing element and a micro heater. Both parts are fabricated using thin-film technology, IC fabrication, and a micromachining technique. The sensing film has a double-layered structure; the first layer is a Fe2O3-based thin-film and the second layer is a SnO2-based thin-film. They are deposited by r.f. sputtering on a SiO2/Al2O3/SiO2 diaphragm formed on a Si substrate. A thin-film heater is also fabricated on a similar diaphragm on another Si substrate. The sensing element and the micro heater are placed in parallel at a distance of about 50μm. The sensor is sensitive to polluting gases such as NOX, exhaust gases, cigarette smoke, and organic floating particles such as pollen.
2010-03-01