Low Cross Talk Design and Simple Fabrication Process of Electrostatic Vertical Comb-drive Actuators for Positioning Application
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概要
- 論文の詳細を見る
- 2007-05-01
著者
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Mita Makoto
Institute Of Space And Astronautical Science (isas)
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Mita Makoto
Institute Of Industrial Science The University Of Tokyo
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FUJITA Hiroyuki
Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science (IIS
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Ataka Manabu
Center For International Research On Micromechatronics (cirmm) Institute Of Industrial Science (iis)
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Fujita Hiroyuki
Center For International Research On Micromechatronics (cirmm) Institute Of Industrial Science (iis)
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ZICKAR Michael
The Institute of Microtechnology (IMT), University of Neuchatel
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Zickar Michael
The Institute Of Microtechnology (imt) University Of Neuchatel
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Fujita Hiroyuki
Center for International Research on Micro Mecharonics, Institute of Industrial Science, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Fujita Hiroyuki
Center for International Research on Micro Mechanics, Institute of Industrial Science, The University of Tokyo
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