MEMS and Optical Applications
スポンサーリンク
概要
- 論文の詳細を見る
- 2000-08-28
著者
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Toshiyoshi Hiroshi
Center For International Research On Micro Mechatronics (cirmm) With Institute Of Industrial Science
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Toshiyoshi Hiroshi
Center For International Research On Micromechatronics Institute Of Industrial Science University Of
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Fujita Hiroyuki
Center For International Research On Micromechatronics (cirmm) Institute Of Industrial Science (iis)
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Fujita Hiroyuki
Center For International Research On Micromechatronics Institute Of Industrial Science University Of
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Fujita Hiroyuki
Center for International Research on Micro Mecharonics, Institute of Industrial Science, University of Tokyo, Meguro, Tokyo 153-8505, Japan
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Fujita Hiroyuki
Center for International Research on Micro Mechanics, Institute of Industrial Science, The University of Tokyo
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Toshiyoshi Hiroshi
Center for International Research on Micro Mechanics, Institute of Industrial Science, The University of Tokyo
関連論文
- In situ Visualization of Degradation of Silicon Field Emitter Tips
- Low Cross Talk Design and Simple Fabrication Process of Electrostatic Vertical Comb-drive Actuators for Positioning Application
- Micro Electro Mechanical Devices for Fiber Optic Telecommunication(Micro Mechanical Engineering)
- Highly Stable Spatio-Temporal Mechanical Characterization of Nanocontact between Sharp Tips Using Electrostatic Microactuator inside Transmission Electron Microscope
- Micromachined Linear Brownian Motor: Transportation of Nanobeads by Brownian Motion Using Three-Phase Dielectrophoretic Ratchet
- Design and Modeling of Compliant Micromechanism for Mechanical Digital-to-Analog Conversion of Displacement
- MEMS and Optical Applications
- In-situ Observation of Shear Deformation of Gold Single Real Contact Point at the Nanoscale
- A22-021 MEM DEVICES FOR FIBER OPTIC TELECOMMUNICATION
- Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System
- Fabrication of Nanometric Oscillators
- An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism
- Characterization of Silicon Nanocantilevers