Power-Regulated Thermal Actuator Based on UV-Patterned Polyimides for a Ciliary Motion System
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概要
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We have been conducting autonomous distributed MEMS research since the early 1990s. We are now working on an international project involving a new concept based on a self-movable and self-reconfigurable micro-conveyor utilizing ciliary-type micro-actuators arranged in an array over a large surface. The fabrication of the ciliary motion system (CMS) has been successfully simplified using photosensitive polyimides patterned by a direct UV lithography technique. The characteristics of the new device are equivalent to those of the previous devices made by classical methods, including plasma ashing. We also propose an integrated CMOS circuit to accurately regulate the input power of the thermal actuators while preventing overheating.
著者
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Ataka Manabu
Center For International Research On Micromechatronics (cirmm) Institute Of Industrial Science (iis)
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Morishita Satoshi
Intelligent Semiconductor Microsystem Laboratory (iSML), Department of Electrical Engineering and Information Systems, Computing and Communication Systems Course, University of Tokyo
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Fujita Hiroyuki
Center for International Research on Micro Mechanics, Institute of Industrial Science, The University of Tokyo
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Mita Yoshio
Intelligent Semiconductor Microsystem Laboratory (iSML), Department of Electrical Engineering and Information Systems, Computing and Communication Systems Course, University of Tokyo
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Collard Dominique
Center for International Research on MicroMechatronics, Institute of Industrial Science (IIS), University of Tokyo
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Malapert Julien
Intelligent Semiconductor Microsystem Laboratory (iSML), Department of Electrical Engineering and Information Systems, Computing and Communication Systems Course, University of Tokyo
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Fujita Hiroyuki
Center for International Research on MicroMechatronics, Institute of Industrial Science, University of Tokyo
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