A22-021 MEM DEVICES FOR FIBER OPTIC TELECOMMUNICATION
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概要
- 論文の詳細を見る
This paper overviews the examples of MEMS device for fiber optic applications such as optical switches and attenuators, and discusses topics awaiting solutions that are common to most MEMS devices.
- 一般社団法人日本機械学会の論文
- 2003-11-30
著者
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Toshiyoshi Hiroshi
Center For International Research On Micro Mechatronics (cirmm) With Institute Of Industrial Science
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Toshiyoshi Hiroshi
Center For International Research On Micro Mechatronics (cirmm) With Institute Of Industrial Science
関連論文
- Micro Electro Mechanical Devices for Fiber Optic Telecommunication(Micro Mechanical Engineering)
- Design and Modeling of Compliant Micromechanism for Mechanical Digital-to-Analog Conversion of Displacement
- MEMS and Optical Applications
- A22-021 MEM DEVICES FOR FIBER OPTIC TELECOMMUNICATION
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- An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism
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