大気圧ヘリウム直流グロー放電の一次元流体シミュレーション

概要

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Atmospheric-pressure glow discharges (APGDs) have been widely used for material processing such as etching, deposition and surface modification and biomedical applications because of the material processing without thermal damage, discharge uniformity over the large area, and so on. In order to suitably utilize APGDs for these applications, further understanding of fundamental properties in APGDs is strongly required. In this paper, the APGDs in helium produced by DC power supply have been simulated using a spatially one-dimensional fluid model. The structure of discharges can be distinguished into five specific regions: a cathode fall, a negative glow, a Faraday dark space, a positive column, and an anode fall. The structure is similar to that of typical low-pressure dc glow discharges. Reasonably good agreement between measured and calculated current-voltage characteristics can be obtained in the present current range (∼10 mA). The discharge-current dependence of the spatial structure, and the mechanism of gas-heating and power-consumption are also discussed.
2009-04-01