3.4 光源プラズマのシミュレーション : キセノンエキシマランプを例として(3. 光源をはかる,プラズマの光源応用〜身近な明かりから次世代光源まで〜)

概要

論文の詳細を見る
Excimer lamp using dielectric-barrier discharges is one of the most powerful light sources of vacuum ultraviolet and applied to the fields of photo-chemical processes such as photo-deposition of thin films, surface modification and polymer etching. The lamp characteristics have been simulated by a one-dimensional fluid model, and their dependence on the electrical input power has been examined under various conditions of the driving frequency, the gas pressure, the waveform of the applied voltage and the discharge gap length. It was found that in particular at narrower discharge-gap, the light output efficiency is improved by means of the applied voltage waveform with an extremely short risetime.
社団法人プラズマ・核融合学会の論文
2005-11-25