Highly Manufacturable and Cost-effective Single Ta_xC / Hf_xZr_<(1-x)>O_2 Gate CMOS Bulk Platform for LP Applications at the 45nm Node and Beyond

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2007-09-19

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Highly Manufacturable and Cost-effective Single Ta_xC / Hf_xZr_O_2 Gate CMOS Bulk Platform for LP Applications at the 45nm Node and Beyond
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