Si_<1-x>Ge_x/Si Selective Etch with HCl for Thin Si-Channel Transistors Integration
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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LOUBET N.
STMicroelectronics
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DENORME S.
STMicroelectronics
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POUYDEBASQUE A.
NXP Semiconductors
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LEVERD F.
STMicroelectronics
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GOURAUD P.
STMicroelectronics
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TALLARON C.
STMicroelectronics
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SKOTNICKI T.
STMicroelectronics
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DUTARTRE D.
STMicroelectronics
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LOUBET N.
ST Microelectronics
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SKOTNICKI T.
ST Microelectronics
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