Impact of Tunnel Etching Process on Electrical Performances of SON Devices
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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SKOTNICKI T.
STMicroelectronics
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Borel S.
Cea-leti
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MONFRAY S.
STMicroelectronics
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CAUBET V.
STMicroelectronics
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ARVET C.
STMicroelectronics
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BILDE J.
CEA-Leti
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CHANEMOUGAME D.
STMicroelectronics
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RANICA R.
STMicroelectronics
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MAZOYER P.
STMicroelectronics
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