Optimization of Hafnium Zirconate (HfZrO_x) Gate Dielectric for Device Performance and Reliability
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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TRIYOSO D.
Freescale Semiconductor Inc.
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RAYMOND M.
Freescale Semiconductor Inc.
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LUCKOWSKI E.
Freescale Semiconductor Inc.
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White B.
Silicon Technology Solutions
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Triyoso D.
Silicon Technology Solutions
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Wang X-d.
Freescale Semiconductor Inc. Austin Silicon Technology Solutions (asts)
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Schaeffer J.
Silicon Technology Solutions
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HEGDE R.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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KALPAT S.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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SAMAVEDAM S.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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SCHAEFFER J.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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CAPASSO C.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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GILMER D.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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ROAN D.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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NGUYEN J.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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LA L.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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HEBERT E.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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GREGORY R.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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RAI R.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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JIANG J.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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LUO T.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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WHITE B.
Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)
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Roan D.
Silicon Technology Solutions
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SAMAVEDAM S.
Silicon Technology Solutions
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GILMER D.
Silicon Technology Solutions
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HEGDE R.
Silicon Technology Solutions
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KALPAT S.
Silicon Technology Solutions
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CAPASSO C.
Silicon Technology Solutions
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Hebert E.
Freescale Semiconductor Inc. Austin Silicon Technology Solutions (asts)
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Rai R.
Freescale Semiconductor Inc. Austin Silicon Technology Solutions (asts)
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Luo T.
Freescale Semiconductor Inc. Austin Silicon Technology Solutions (asts)
関連論文
- Highly Manufacturable and Cost-effective Single Ta_xC / Hf_xZr_O_2 Gate CMOS Bulk Platform for LP Applications at the 45nm Node and Beyond
- Optimization of Hafnium Zirconate (HfZrO_x) Gate Dielectric for Device Performance and Reliability
- Challenges for PMOS Metal Gate Electrodes and Solutions for Low Power Applications