Challenges for PMOS Metal Gate Electrodes and Solutions for Low Power Applications

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• White B.

  Silicon Technology Solutions

• Triyoso D.

  Silicon Technology Solutions

• Schaeffer J.

  Silicon Technology Solutions

• Roan D.

  Silicon Technology Solutions

• TAYLOR W.

  Silicon Technology Solutions

• SAMAVEDAM S.

  Silicon Technology Solutions

• GILMER D.

  Silicon Technology Solutions

• HEGDE R.

  Silicon Technology Solutions

• KALPAT S.

  Silicon Technology Solutions

• CAPASSO C.

  Silicon Technology Solutions

• SADD M.

  Silicon Technology Solutions

• STOKER M.

  Silicon Technology Solutions

• HAGGAG A.

  Silicon Technology Solutions

関連論文

• Highly Manufacturable and Cost-effective Single Ta_xC / Hf_xZr_O_2 Gate CMOS Bulk Platform for LP Applications at the 45nm Node and Beyond
• Optimization of Hafnium Zirconate (HfZrO_x) Gate Dielectric for Device Performance and Reliability
• Challenges for PMOS Metal Gate Electrodes and Solutions for Low Power Applications

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