Low Resistance Ni Thin Film Deposition for Nickel Silicide by Atomic Layer Deposition
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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LEE J.
School of Elec. Eng. and Computer Science, Kyungpook National Univ.
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Kim K.
School Of Mechanical Engineering Pusan National University
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LEE H.
School of Electrical Engineering and Computer Science, Kyungpook National University
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CHO H.
School of Electrical Engineering and Computer Science, Kyungpook National University
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HAHM S.
School of Electrical Engineering and Computer Science, Kyungpook National University
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YANG C.
School of Electrical Engineering and Computer Science, Kyungpook National University
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KONG S.
School of Electrical Engineering and Computer Science, Kyungpook National University
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Hahm S.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Lee J.
School Of Advanced Materials Science And Engineering And Skku Advanced Institute Of Nanotechnology S
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Kang I.
School Of Electrical Engineering And Computer Science Kyungpook National University
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DO K.
School of Electrical Engineering and Computer Science, Kyungpook National University
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BACK K.
School of Electrical Engineering and Computer Science, Kyungpook National University
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Lee J.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Lee H.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Kim K.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Kong S.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Do K.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Cho H.
School Of Electrical Engineering And Computer Science Kyungpook National University
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Back K.
School Of Electrical Engineering And Computer Science Kyungpook National University
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