Low Temperature Growth C-54 TiSi_2 by Plasma Enhanced Chemical Vapor Deposition of Titanium on (001)Si

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概要

• 論文の詳細を見る
• 1997-12-15

著者

• YANG Y.

  National Central University

• CHANG T.

  National Nano Device Laboratories

• Chen L.

  Department Of Engineering Science National Cheng Kung University

• Hu J.

  Department Of Applied Physics School Of Engineering Nagoya University

• Chang C.

  Institute Of Electronics Engineering National Chiao Tung University

• Chang C.

  Institute Of Electronics National Chiao Tung University

• MEI Y.

  Institute of Electronics, National Chiao Tung University

• Chang C.

  Institute Of Applied Mechanics National Taiwan University

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