Resist Reflow Modeling Including Surface Tension and Bulk Effect

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-04-15

著者

• Kim Kang

  Department Of Theoretical And Computational Molecular Science Institute For Molecular Science

• Park Jun-min

  Department Of Applied Physics Hanyang University

• Lee Ji-eun

  Department Of Applied Physics Hanyang University

• Oh Hye-keun

  Department Of Physics Hanyang University

• Park Seung-wook

  Department Of Applied Physics Hanyang University

• LEE Sung-Muk

  Department of Physics Education, Seoul National University

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