Effects of Thermal Stability of Si_<1-x-y>Ge_xC_y Layers on Properties of Their Contacts with Aluminum

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概要

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1996-08-26

著者

Yu Paul
Department Of Electrical And Computer Engineering University Of California
YANG Cary
Microelectronics Laboratory, Santa Clara University
GUPTA Ashawant
Microelectronics Laboratory, Santa Clara University
Gupta Ashawant
Microelectronics Laboratory Santa Clara University
MI Jian
Microelectronics Laboratory, Santa Clara University
ZHU Jintian
Department of Electrical and Computer Engineering, University of California
WARREN Patricia
Institute for Micro- and Optoelectronics, Department of Physics Swiss Federal Institute of Technolog
DUTOIT Michel
Institute for Micro- and Optoelectronics, Department of Physics Swiss Federal Institute of Technolog
Mi Jian
Microelectronics Laboratory Santa Clara University
Zhu Jintian
Department Of Electrical And Computer Engineering University Of California
Dutoit Michel
Institute For Micro- And Optoelectronics Department Of Physics Swiss Federal Institute Of Technology
Warren Patricia
Institute For Micro- And Optoelectronics Department Of Physics Swiss Federal Institute Of Technology
Yang Cary
Microelectronics Laboratory Santa Clara University
Yang Cary
Microelectronics Lab. Santa Clara University

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