The Effect of Underlayer Texture on Cu Film Orientation in Cu/Refractory-Metal Structure

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概要

• 論文の詳細を見る
• 1997-09-16

著者

• Onoda Hiroshi

  Vlsi Research And Development Center Oki Electric Industry Co. Ltd.

• HARADA Yusuke

  VLSI Research and Development Center, Oki Electric Industry Co., Ltd.

• Harada Yusuke

  Vlsi Research And Development Center Oki Electric Industry Co. Ltd.

• Abe Kazuhide

  Vlsi Research And Development Center Oki Electric Industry Co. Ltd.

• Onoda Hiroshi

  Vlsi R&d Center Oki Electric Industry Co. Ltd.

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• Ohmic Contact in Electron Cyclotron Resonance Chemical Vapor Deposition-TiN/Si Structure
• The Effect of Underlayer Texture on Cu Film Orientation in Cu/Refractory-Metal Structure
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