A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage
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概要
- 論文の詳細を見る
In this paper, we propose a new low-profile design for a linear bearing based on Near-Field Acoustic Levitation (NFAL). Two flat beams at a 45° angle are used as a guide rail, and a slider is levitated by ultrasonic bending vibrations excited along the beams. The beams are excited by a pair of Langevin transducers with “+”-shaped vibration direction converters (L-L converters) to install the transducers in the same plane of the beam and to lower the total height of the setup. First, the design of the vibration converter is described. Then, a two-phase driving system to excite a traveling wave is investigated theoretically and experimentally. The levitation characteristics and the sliding performance of the prototype stage are measured and discussed.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
-
Friend James
Precision And Intelligence Laboratory Tokyo Institute Of Technology
-
Ueha Sadayuki
Precision And Intelligence Laboratory Tokyo Institute Of Technology
-
Ueha Sadayuki
Precision And Intelligence Lab. Tokyo Inst. Of Technol.
-
Nakamura Kentaro
Precision And Intelligence Lab. Tokyo Inst. Of Technol.
-
Ide Takeshi
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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