Magnification of Transportation Range Using Not-Contact Acoustic Levitation by Connecting Vibrating Plates
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概要
- 論文の詳細を見る
The authors have identified a new acoustic phenomenon by which an object weighing several kilograms and having a planar shape can be levitated by radiation pressure above a set of vibrating plates. We propose to use this phenomenon for levitation and transportation systems for moving silicon wafers and liquid crystal devices (LCDs), In this report, the authors describe a method that increases the capability of the device to carry large objects by placing two vibrating plates in parallel and enlarges the transportation range by placing the vibrating plates in a series. The results show that a large object such as an LCD 250 mm square can be transported long distances limited only by the number of plates placed in series.
- 社団法人応用物理学会の論文
- 1997-05-30
著者
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Koike Yoji
Institute For Materials Research Tohoku Universisty
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Koike Yasuhiro
Department Of Material Science Faculty Of Science And Technology Keio University
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Koike Y
Faculty Of Science And Technology Keio University
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UEHA Sadayuki
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Hashimoto Y
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
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Koike Yoshikazu
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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HASHIMOTO Yoshiki
Kaijo Corporation
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HASHIMOTO Yoshihiro
Osaka Electro-Communication University
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Ueha Sadayuki
Precision And Intelligence Lab. Tokyo Inst. Of Technol.
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Koike Yoshikazu
Precision And Intelligence Laboratory Tokyo Institute Of Technology
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