Influence of Organic Contamination on Reliability and Trap Generation in MOS Devices
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概要
- 論文の詳細を見る
- 2001-09-25
著者
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YOKOYAMA S.
Research Center for Integrated Systems, Hiroshima University
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Kikkawa T.
Research Center For Nanodevices And Systems Hiroshima University
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SHIBAHARA K.
Research Center for Nanodevices and Systems, Hiroshima University
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YOSHINO T.
Research Center for Nanodevices and Systems, Hiroshima University
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FUJII T.
EBARA Research Co., Ltd.
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NAKAJIMA A.
Research Center for Nanodevices and Systems, Hiroshima University
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SUNAMI H.
Research Center for Nanodevices and Systems, Hiroshima University
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KHOSRU Q.
Research Center for Nanodevices and Systems, Hiroshima University
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Khosru Q.
Research Center For Nanodevices And Systems Hiroshima University
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Shibahara K.
Research Center For Nanodevices And Systems Hiroshima University
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Yoshino T.
Research Center For Nanodevices And Systems Hiroshima University
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