Effect of hexamethyldisilazane on the electrical characteristics of a porous silica thin film
スポンサーリンク
概要
- 論文の詳細を見る
The effect of hexamethyldisilazane (HMDS) vapor treatment on the leakage current and capacitance of the porous silica thin film having periodic structure were investigated. The leakage current and dielectric constant of the film increased during measurement in the air due to moisture absorption. It is found that the HMDS treatment of the silica film could suppress the increase of leakage current and dielectric constant. The increase of leakage current and dielectric constant could be suppressed by approximately 1/100, and 1/10, respectively.
- 一般社団法人電子情報通信学会の論文
- 2002-06-24
著者
-
Kikkawa T.
Research Center For Nanodevices And Systems Hiroshima University
-
Kikkawa T.
Research Center For Nanodevices Hiroshima University
-
Komura K.
Research Center For Nanodevices Hiroshima University
-
Sakamoto S.
Research Center for Nanodevices, Hiroshima University
関連論文
- A 0.18μm CMOS Impulse Radio Based UWB Transmitter for Global Wireless Interconnections of 3D Stacked-Chip System
- Analysis of Transmission Characteristics of Gaussian Monocycle Pulse for Silicon Integrated Antennas
- Effects of Silylation on Electrical and Mechanical Characteristics of Mesoporous Pure Silica Zeolite Films
- Effects of vapor phase transport synthesis on the properties of porous silica films
- Formation of Mesoporous Pure Silica Zeolite Film
- Pure-Silica Zeolite Films Prepared by a Vapor Phase Transport Method
- UWB Transmission Characteristics of Bow-tie Antennas on Si
- Efficient Design of Integrated Antenna on Si for On-chip Wireless Interconnect
- Scaling Characteristics of Si On-chip Integrated Antennas
- A Single-chip Ultra-Wideband Receiver using Silicon Integrated Antennas for Inter-chip Wireless Interconnection
- Inter-chip Transmission Characteristics of Meander Dipole Antennas Integrated in 0.18μm CMOS UWB Transceiver Chips
- Effect of hexamethyldisilazane on the electrical characteristics of a porous silica thin film
- Effect of hexamethyldisilazane on the electrical characteristics of a porous silica thin film
- Transmission characteristics of Gaussian monocycle pulse for inter-chip wireless interconnection using integrated antenna
- Inductive-Coupled RF Magnetron Plasma Deposition of (Ba, Sr)TiO_3 for Decoupling Capacitors
- Copper Ion Drift Rates in Porous Methylsilsesquiazane Dielectric Films
- Influence of Organic Contamination on Reliability and Trap Generation in MOS Devices
- 3D Spatial Sound Systems Compatible with Human's Active Listening to Realize Rich High-Level kansei Information
- Efficient Design of Integrated Antennas on Si for On-Chip Wireless Interconnects in Multi-Layer Metal Process