Copper Ion Drift Rates in Porous Methylsilsesquiazane Dielectric Films
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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ODA T.
Research Information Center, Institute of Plasma Physics, Nagoya University
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Kikkawa T.
Research Center For Nanodevices And Systems Hiroshima University
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MUKAIGAWA S.
Research Center for Nanodevices and Systems, Hiroshima University
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AOKI T.
Tonen Corporation
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SHIMIZU Y.
Tonen Corporation
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Mukaigawa S.
Research Center For Nanodevices And Systems Hiroshima University
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