Electrical Properties of 1-μm-Thick Continuous β-FeSi_2 Films on Abraded Si-Substrates Grown by RF-Magnetron Sputtering
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概要
- 論文の詳細を見る
- 2004-10-15
著者
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TAKAHASHI Masashi
Department of Veterinary Internal Medicine, Graduate School of Agricultural and Life Sciences, The U
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Ito K
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
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Ito K
Shinshu Univ. Nagano Jpn
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Ito Kentaro
Department Of Psychiatry Tokyo Medical University
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MOMOSE Noritaka
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
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HASHIMOTO Yoshio
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University
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