The Electrical and Material Properties of HfO_xN_y Dielectric on Germanium Substrate
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2004-09-15
著者
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ZHANG Qingchun
Silicon Nano Device Laboratory, Department of Electrical and Computer Engineering, National Universi
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WU Nan
Silicon Nano Device Laboratory, Department of Electrical and Computer Engineering, National Universi
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ZHU Chunxiang
Silicon Nano Device Laboratory, Department of Electrical and Computer Engineering, National Universi
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Wu Nan
Silicon Nano Device Lab Department Of Electrical And Computer Engineering National University Of Sin
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Zhu Chunxiang
Silicon Nano Device Lab Department Of Electrical And Computer Engineering National University Of Sin
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