Growth and Surface Morphology of Textured NiO Thin Films Deposited by Off-Axis RF Magnetron Sputtering

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概要

• 論文の詳細を見る
• 2004-08-15

著者

• Ryu Hyun-wook

  Research Institute Of Energy Resources Technology Chosun University

• PARK Jin-Seong

  Department of New Material Engineering, CHOSUN University

• Park Jin-seong

  Department Of Advanced Materials Engineering Chosun University

• CHOI Gwang-Pyo

  Research Institute of Energy Resources Technology, Chosun University

• HONG Gwang-Jun

  Department of Physics, Chosun University

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• Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry
• Growth and Surface Morphology of Textured NiO Thin Films Deposited by Off-Axis RF Magnetron Sputtering
• Photocatalytic Functional Coating of TiO2 Thin Film Deposited by Cyclic Plasma Chemical Vapor Deposition at Atmospheric Pressure
• Meyer–Neldel Rule and Extraction of Density of States in Amorphous Indium–Gallium–Zinc-Oxide Thin-Film Transistor by Considering Surface Band Bending
• Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry
• Origin of Device Performance Degradation in InGaZnO Thin-Film Transistors after Crystallization
• Hillock Formation of SnO2 Thin Films Prepared by Metal-Organic Chemical Vapor Deposition
• Growth and Surface Morphology of Textured NiO Thin Films Deposited by Off-Axis RF Magnetron Sputtering

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