Magnetron-sputtered Hydrogenated Carbon Nitride : Structural and Optical Properties of As-deposited and Postannealed Films

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-11-15

著者

• KITAJIMA Masahiro

  National Research Institute for Metals

• Nakamura Itakura

  National Institute For Materials Science

• TERAI Takayuki

  Department of Nuclear Engineering, Faculty of Engineering, University of Tokyo

• Terai Takayuki

  Department Of Quantum Engineering And Systems Science School Of Engineering The University Of Tokyo

• VINOD Purayath

  Department of Quantum Engineering and Systems Science, School of Engineering, The University of Toky

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