Mechanical, Thermal, and Tribological Properties of Amorphous Carbon Films
スポンサーリンク
概要
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In this paper, the correlation among the hardness, determined by the nanoindentation method, the thermal conductivity, by the $3\omega$ method and friction coefficient, by the ball on disk (BOD) method; of tetrahedral amorphous carbon (ta-C) films deposited on Si substrates and WC/Co substrates by the filtered cathodic vacuum arc (FCVA) deposition method has been investigated. The films were also characterized by Raman spectroscopy and Rutherford backscattering/elastic recoil detection analysis (RBS/ERDA). The experimental results were discussed in terms of the microstructure of ta-C films depending on the kind of substrate. It was revealed that the hardness and the thermal conductivity of ta-C films on WC/Co substrates were higher than those on Si substrates and they increased with density. The increase in density was correlated with the decrease in $I_{\text{D}}/I_{\text{G}}$ corresponding to the graphite cluster size $L_{\text{a}}$ of the films. The density of a ta-C film on the wear track increased after BOD tests because of the mechanical stress during sliding.
- 2009-05-25
著者
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TERAI Takayuki
Department of Nuclear Engineering, Faculty of Engineering, University of Tokyo
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Terai Takayuki
Department of Quantum Engineering and Systems and Science, School of Engineering, University of Tokyo, Tokyo 113-8656, Japan
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Kobayashi Tomohiro
RIKEN (The Institute of Physics and Chemical Research), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
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Miyai Seiichi
Department of Quantum Engineering and Systems and Science, School of Engineering, University of Tokyo, Tokyo 113-8656, Japan
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