Characteristics of large-Area Cold Atmospheric Discharges from Radio-Frequency Microdischarge Arrays

スポンサーリンク

概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-10-15

著者

• HONG Franklin

  Department of Chemical Engineering National Cheng Kung University

• Guo Yoou-bin

  Department Of Chemical Engineering National Cheng Kung University

関連論文

• Mechanism of Chemical Mechanical Planarization Induced Edge Corrosion of Copper Line for Cu/Low-k SiOC Interconnects
• Characteristics of large-Area Cold Atmospheric Discharges from Radio-Frequency Microdischarge Arrays
• Characterization of Dual Hollow Cathode Arc Chemical Vapor Deposition by Optical Emission Spectroscopy
• Deposition of Micro-Crystalline β-C_3N_4 Films by an Inductively-Coupled-Plasma (ICP) Sputtering Method
• Enhanced Growth of β-C_3N_4 Crystallites at a High Substrate Temperature
• Diamond Growth by Dual Hollow Cathode Arc Chemical Vapor Deposition
• Characteristics of Large-Area Cold Atmospheric Discharges from Radio-Frequency Microdischarge Arrays

スポンサーリンク