Digital Etching of (001) InP Substrate by Intermittent Injection of Tertiarybutylphosphine in Ultrahigh Vacuum
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-12-01
著者
-
Suto Ken
Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi
-
Oyama Y
Department Of Materials Science Graduate School Of Engineering Tohoku University
-
Nishizawa Jun-ichi
Telecommunications Advncement Organization Of Japan Sendai Research Center
-
Kikuchi H
Telecommunications Advancement Organization Of Japan Sendai Research Center:semiconductor Research I
-
OTSUKA Nobuyuki
Telecommunications Advancement Organization of Japan, SENDAI Research Center
-
OYAMA Yutaka
Telecommunications Advancement Organization of Japan, SENDAI Research Center
-
KIKUCHI Hideyuki
Telecommunications Advancement Organization of Japan, SENDAI Research Center
関連論文
- GaP Raman Terahertz high accuracy spectrometer and its application to detect organic and inorganic crystalline defects
- A comparative study of THz spectra
- Digital Etching of InP by Intermittent Injection of Phosphorous Precursors in Ultra-high Vacuum
- Self-Limiting Growth of Specular InP Layer by Alternate Injection of Triethylindium and Tertiarybutylphosphine in Ultrahigh Vacuum
- Digital Etching of (001) InP Substrate by Intermittent Injection of Tertiarybutylphosphine in Ultrahigh Vacuum
- Digital Etching of (001) InP Substrate by Intermittent Injection of Tertiarybutylphosphine in Ultrahigh Vacuum
- Digital Etching of InP Using Tris-Dimethylaminophosphorus in Ultra-High Vacuum
- Compositional Dependence of Hardness in ZnSe_Te_x and Be_yZn_Se_Te_x
- Effective Segregation Coefficient of Tellurium in ZnSe_Te_x and Be_yZn_Se_Te_x Bulk Crystals Grown Using Traveling Solvent Method
- Lattice Parameter Deviation of InP Single Crystals Grown by the Horizontal Bridgman Method under Controlled Phosphorus Vapor Pressure
- Deep Level in InP Crystal Grown by the Horizontal Bridgman Method under Controlled Phosphorus Vapor Pressure
- High Rate Deposition of Silicon Dioxide Membrane by Excimer Laser Enhanced Projection Chemical Vapor Deposition from Organic Compounds at Low Temperature
- Fabrication and Characterization of GaP Photonic Crystals for Terahertz Wave Application
- Terahertz Wave Generation from GaP with Continuous Wave and Pulse Pumping in the 1-1.2μm Region
- Consequence of a Defect on the Terahertz Spectra of L-Asparagine Monohydrate
- Photocapacitance Measurement on Intentionally Undoped n-Type Ga_Al_As Grown by Stoichiometry Control Method
- Phase Transitions in the Frustrated ABX_3 Compounds : II. LOW TEMPERATURE PROPERTIES OF SOLIDS : Magnetism : Spin Glass
- Luminescence from Diffused In_Ga_xP p_n Junctions
- Bright Yellow Luminescence from In_Ga_xP p-n Junctions
- Growth of In_Ga_xP Crystals from Solution
- A STUDY ON GENERAL ENDURABILITY
- CARDIAC FUNCTION OF SPORTS CHAMPIONS