Chemical State of Phosphorus at the Silicon Surface

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概要

• 論文の詳細を見る
• 1997-07-01

著者

• Ono K

  Univ. Tokyo Tokyo Jpn

• SATO Yoshiyuki

  NTT LSI Laboratories

• MAEYAMA Satoshi

  NTT Laboratories

• YOSHIMURA Yusuke

  The University of Tokyo

• ONO Kanta

  The University of Tokyo

• FUJIOKA Hiroshi

  The University of Tokyo

• OSHIMA Masaharu

  The University of Tokyo

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• Chemical State of Phosphorus at the Silicon Surface

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