Ta多孔質体の焼結挙動と静電容量特性への粒径の影響

概要

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Ta has been mainly used for capacitor. Recently, electrolytic capacitor of Ta has been demanded to be smaller size and higher performance. But, there is few reports about sintering of Ta. Then, in this work, the sintering behaviors and the capacitance. of porous Ta sintered by capsule free HIP sintering and vacuum sintering about two kinds of Ta powders with different particle size of 1.7μm (No.A) and 3.5μm (No.B), were discussed. The relative density of sintered Ta compact was independent on particle size of starting powder and increased with an increase in sintering temperature and sintering time. The coarsening of grain increased markedly in the compact sintered from smaller particles as compared to the compact from larger particles. The capacitance of sintered compact from No.A was larger than that from No.B. Tans of No.B was smaller than that from No.A.
社団法人粉体粉末冶金協会の論文
1998-08-15