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Silicon Technology Center, Sumitomo Sitix Corp. | 論文
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers
- Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics
- Relationship between Grown-in Defects in Czochralski Silicon Crystals
- Generation of Oxidation-Induced Stacking Faults in Czochralski-Grown Silicon Crystals Exhibiting a Ring-like Distributed Stacking Fault Region
- Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
- Gettering Characteristics of Heavy Metal Impurities in Silicon Wafers with Polysilicon Back Seal and Internal Gettering
- Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals
- A Model for the Formation of Oxidation-Induced Stacking Faults in Czochralski Silicon