スポンサーリンク
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd. | 論文
- A 16-bit Digital Signal Processor with Specially Arranged Multiply-Accumulator for Low Power Consumption
- A Novel Al/TiN/CVD-W Structure to Eliminate Resistance Anomaly in Deep Submicron Al/CVD-W Interconnects
- Radical Behavior in Inductively Coupled Fluorocarbon Plasma for SiO2 Etching
- RIE-Lag Reduction by NH_3 Addition in Aluminum Alloy Etching under BCl_3/Cl_2 Chemistry
- New Dielectric Breakdown Model of Local Wearout in Ultra Thin Silicon Dioxides
- ZnSe-Based Diode Lasers with Stripe-Geometry Fabricated by Ion Bombardment
- Suppression of Resistance Increase in Al/W Interconnects by N_2 Plasma Treatment
- Fabrication of Novel Si Double-Barrier Structures and Their Characteristics
- High Reliability Trench Isolation Technology with Elevated Field Oxide Structure for Sub-Quarter Micron CMOS Devices