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Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo | 論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold