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Graduate School of Science, LASTI, Himeji Institute of Technology | 論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- Surface Modification of Diamond-like Carbon by Synchrotron Radiation Exposure under the Perfluorohexane Gas Atmosphere
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon