Nakamura Tomoji | Semiconductor Technology Academic Research Center, 17-2 Shin Yokohama 3-chome, Kohoku, Yokohama 222-0033, Japan
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概要
- Nakamura Tomojiの詳細を見る
- 同名の論文著者
- Semiconductor Technology Academic Research Center, 17-2 Shin Yokohama 3-chome, Kohoku, Yokohama 222-0033, Japanの論文著者
関連著者
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Uedono Akira
Institute of Applied Physics and Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennodai, Tsukuba 305-8573, Japan
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Nakamura Tomoji
Semiconductor Technology Academic Research Center, 17-2 Shin Yokohama 3-chome, Kohoku, Yokohama 222-0033, Japan
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Ohdaira Toshiyuki
National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Suzuki Ryoichi
National Institute Of Advanced Industrial Science And Technology
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Eguchi Kazuhiro
Semiconductor Company Toshiba Corporation
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Yoshimaru Masaki
Semiconductor R&d Division Semiconductor Business Group Oki Electric Industry Co. Ltd.
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Uedono Akira
Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305-8573, Japan
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Inoue Naoya
Semiconductor Technology Academic Research Center, Kohoku, Yokohama 222-0033, Japan
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Hayashi Yoshihiro
Semiconductor Technology Academic Research Center, Kohoku, Yokohama 222-0033, Japan
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Hirose Yukinori
Semiconductor Technology Academic Research Center, Kohoku, Yokohama 222-0033, Japan
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Nakamura Tomoji
Semiconductor Technology Academic Research Center, Kohoku, Yokohama 222-0033, Japan
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Oshima Nagayasu
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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Ohdaira Toshiyuki
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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Suzuki Ryoichi
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan
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Suzuki Takashi
Semiconductor Technology Academic Research Center, 17-2 Shin Yokohama 3-chome, Kohoku, Yokohama 222-0033, Japan
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Yoshimaru Masaki
Semiconductor Technology Academic Research Center, Kohoku, Yokohama 222-0033, Japan
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Eguchi Kazuhiro
Semiconductor Technology Academic Research Center, Kohoku, Yokohama 222-0033, Japan
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Oshima Nagayasu
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Suzuki Ryoichi
Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
著作論文
- Characterization of Low-$k$/Cu Damascene Structures Using Monoenergetic Positron Beams
- Defects in Electroplated Cu and Their Impact on Stress Migration Reliability Studied using Monoenergetic Positron Beams