Kataoka Yoshinori | Corporate Manufacturing Engineering Center Toshiba Corporation
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概要
関連著者
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Kataoka Yoshinori
Corporate Manufacturing Engineering Center Toshiba Corporation
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KATAOKA Yoshinori
Corporate manufacturing Engineering Center, Toshiba Corporation
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Kanoh Masaaki
Corporate Manufacturing Engineering Center Toshiba Corporation
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MAKINO Nobuaki
Corporate Manufacturing Engineering Center, Toshiba Corporation
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KANOH Masaaki
Corporate Manufacturing Engineering Center, Toshiba Corporation
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Yamauchi Takeshi
Corporate Manufacturing Engineering Center Toshiba Corporation
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Makino N
Toshiba Corp. Yokohama Jpn
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Makino Nobuaki
Corporate Manufacturing Engineering Center Toshiba Corporation
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SUZUKI Keiji
Corporate manufacturing Engineering Center, Toshiba Corporation
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SAITOH Shuishi
Corporate manufacturing Engineering Center, Toshiba Corporation
著作論文
- Dry Etching Characteristics of Si-based Materials Using CF_4/O_2 Atmospheric-Pressure Glow Discharge Plasma
- Microwave-Excited Large-Area Plasma Source Using a Slot Antenna
- Evaluation of n^+a-Si Contact with Indium Tin Oxide by X-Ray Photoelectron Spectroscopy Valence Band Measurement
- Selective Plasma Surface Modification of Resist for Patterning Hydrophobic and Hydrophilic Regions