SAKAKIBARA Yutaka | NTT LSI Laboratories
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概要
関連著者
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SAKAKIBARA Yutaka
NTT LSI Laboratories
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小林 孝嘉
東京大学理学系研究科
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Ogawa Shinji
Department Of Electrical And Electronic Engineering And Information Engineering Nagoya University
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KUNII Yasuo
NTT LSI Laboratories
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Ohsaki Shintaro
Department Of Electrical And Electronic Engineering And Information Engineering Nagoya University
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Nakayama Satoshi
NTT LSI Laboratories
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Kobayashi Toshio
NTT LSI Laboratories
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Sakakibara Y
National Institute Of Advanced Industrial Science And Technology (aist)
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Nakayama S
Sii Nano Technology Inc.
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OGAWA Shigeo
NTT LSI Laboratories
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Sakakibara Yutaka
Ntt Lsi Laboratories Nippon Telegraph And Telephone Corporation
著作論文
- Evaluation of Hot-Hole Induced Interface Traps at the Tunneling SiO_2(3.5nm)-Si Interface by the Conductance Technique
- Si Surface Cleaning by Si_2H_6-H_2 Gas Etching and Its Effects on Solid-Phase Epitaxy