AWAYA Nobuyoshi | NTT System Electronics Laboratories
スポンサーリンク
概要
関連著者
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AWAYA Nobuyoshi
NTT System Electronics Laboratories
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KOBAYASHI Toshio
NTT System Electronics Laboratories
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HIRATA Akihiko
NTT Microsystem Integration Labs., NTT Corporation
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MACHIDA Katsuyuki
NTT Advanced Technology Corporation
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Maeda Masahiko
Ntt System Electronics Laboratories
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Hirata Akihiko
Ntt Microsystem Integration Labs. Ntt Corporation
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Kyuragi H
Ntt Microsystem Integration Laboratories Ntt Corporation
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HIRATA Akihiko
NTT System Electronics Laboratories
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MACHIDA Katsuyuki
NTT System Electronics Laboratories
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KYURAGI Hakaru
NTT System Electronics Laboratories
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Awaya Nobuyoshi
Ntt System Electronics Laboratories:(present Address)sharp Corporation Vlsi Development Laboratories
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Machida K
Ntt Advanced Technology Corporation
著作論文
- Copper Damascene Interconnection with Tungsten Silicon Nitride Diffusion Barrier Formed by Electron Cyclotron Resonance Plasma Nitridation
- Effect of Thin-Film Texture and Zirconium Diffusion on Reliability against Electromigration in Chemical-Vapor-Deposited Copper Interconnects
- The Effect of Film Texture and Zirconium Diffusion on Reliability Against Electromigration for CVD Copper
- Self-Aligned Passivation Technology for Copper Interconnection Using Copper-Aluminum Alloy