HIRATA Akihiko | NTT System Electronics Laboratories

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概要

• 同名の論文著者
• NTT System Electronics Laboratoriesの論文著者

関連著者

• HIRATA Akihiko

  NTT Microsystem Integration Labs., NTT Corporation

• Hirata Akihiko

  Ntt Microsystem Integration Labs. Ntt Corporation

• Kyuragi H

  Ntt Microsystem Integration Laboratories Ntt Corporation

• HIRATA Akihiko

  NTT System Electronics Laboratories

• MACHIDA Katsuyuki

  NTT System Electronics Laboratories

• KYURAGI Hakaru

  NTT System Electronics Laboratories

• Machida K

  Ntt Advanced Technology Corporation

• Maeyama Satoshi

  Ntt Applied Electronics Laboratories

• Maeyama Satoshi

  Ntt Basic Research Laboratories

• MACHIDA Katsuyuki

  NTT Advanced Technology Corporation

• WATANABE Yoshio

  NTT Basic Research Laboratories

• Maeda Masahiko

  Ntt System Electronics Laboratories

• Maeyama S

  Ntt Basic Res. Lab. Kanagawa Jpn

• AWAYA Nobuyoshi

  NTT System Electronics Laboratories

• Awaya Nobuyoshi

  Ntt System Electronics Laboratories:(present Address)sharp Corporation Vlsi Development Laboratories

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著作論文

• Copper Damascene Interconnection with Tungsten Silicon Nitride Diffusion Barrier Formed by Electron Cyclotron Resonance Plasma Nitridation
• Diffusion Barrier Mechanism of Extremely Thin Tungsten Silicon Nitride Film Formed by ECR Plasma Nitridation

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