Kazumi Hideyuki | Hitachi Research Laboratory Hitachi Ltd.
スポンサーリンク
概要
関連著者
-
Kazumi Hideyuki
Hitachi Research Laboratory Hitachi Ltd.
-
YOSHIOKA Ken
Kasado Design Department, Semiconductor Equipment Product Division, Semiconductor Manufacturing Equi
-
Kanai Saburo
Kasado Division Hitachi High-technologies Corporation
-
Mise Nobuyuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
-
DOI Akira
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
-
KAZUMI Hideyuki
Hitachi Research Laboratory, Hitachi, Ltd.
-
Kanekiyo Tadamitsu
Kasado Division Hitachi High-technologies Corporation
-
Edamura Manabu
Mechanical Engineering Research Laboratory Hitachi Ltd.
-
Doi A
Mechanical Engineering Research Laboratory Hitachi Ltd.
-
EDAMURA Manabu
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
-
NISHIO Ryoji
Kasado Division, Hitachi High-Technologies Corporation
-
KANEKIYO Tadamitsu
Kasado Division, Hitachi High-Technologies Corporation
-
KANNO Seiichiro
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
-
Nishio R
Hitachi High‐technologies Corp. Yamaguchi Jpn
-
Kanno S
Hitachi Ltd. Ibaraki Jpn
-
Kanno Seiichiro
Mechanical Engineering Research Laboratory Hitachi Ltd.
-
Kazumi Hideyuki
Hitachi Research Laboratory Kasado Works Hitachi Ltd.
-
HAMASAKI Ryoji
Hitachi Research Laboratory, Kasado Works, Hitachi, Ltd.
-
TAGO Kazutami
Hitachi Research Laboratory, Kasado Works, Hitachi, Ltd.
-
Tago Kazutami
Hitachi Research Laboratory Kasado Works Hitachi Ltd.
-
Hamasaki Ryoji
Hitachi Research Laboratory Kasado Works Hitachi Ltd.
-
Nishio Ryoji
Kasado Division Hitachi High-technologies Corporation
-
Hamasaki Ryoji
794, Higashitoyoi Kudamatsu-shi, Yamaguchi 744, Japan
-
Mise Nobuyuki
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
-
Yoshioka Ken
Kasado Division, Hitachi High-Technologies Corporation, 794 Higashi-Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan
-
Kazumi Hideyuki
Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
-
Doi Akira
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
-
Kanai Saburo
Kasado Division, Hitachi High-Technologies Corporation, 794 Higashi-Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan
-
Nishio Ryoji
Kasado Division, Hitachi High-Technologies Corporation, 794 Higashi-Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan
-
Edamura Manabu
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
-
Kanno Seiichiro
Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan
著作論文
- A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology : Chamber Surface Reaction Control in the Etching of Nonvolatile Materials
- Radical and Ion Compositions of BCl_3/Cl_2 Plasma and Their Relation to Aluminum Etch Characteristics
- A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology: Chamber Surface Reaction Control in the Etching of Nonvolatile Materials