Doi Akira | Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan

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概要

• Doi Akiraの詳細を見る
• 同名の論文著者
• Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japanの論文著者

関連著者

• YOSHIOKA Ken

  Kasado Design Department, Semiconductor Equipment Product Division, Semiconductor Manufacturing Equi

• Kanai Saburo

  Kasado Division Hitachi High-technologies Corporation

• Mise Nobuyuki

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• DOI Akira

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• Kanno Seiichiro

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Kanekiyo Tadamitsu

  Kasado Division Hitachi High-technologies Corporation

• Edamura Manabu

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Kazumi Hideyuki

  Hitachi Research Laboratory Hitachi Ltd.

• Nishio Ryoji

  Kasado Division Hitachi High-technologies Corporation

• Mise Nobuyuki

  Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan

• Yoshioka Ken

  Kasado Division, Hitachi High-Technologies Corporation, 794 Higashi-Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan

• Kazumi Hideyuki

  Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan

• Doi Akira

  Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan

• Kanai Saburo

  Kasado Division, Hitachi High-Technologies Corporation, 794 Higashi-Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan

• Nishio Ryoji

  Kasado Division, Hitachi High-Technologies Corporation, 794 Higashi-Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan

• Edamura Manabu

  Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan

• Kanno Seiichiro

  Mechanical Engineering Research Laboratory, Hitachi, Ltd., 502 Kandatsu, Tsuchiura, Ibaraki 300-0013, Japan

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著作論文

• A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology: Chamber Surface Reaction Control in the Etching of Nonvolatile Materials

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